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Development and Characterization of Platinum Thin Films for Gas Analysis Microsystem


Authors

  • Alamin, A. B.
  • Sklorz, A.
  • Benecke, W.
  • Lang, W.

Meta information [BibTeX]

  • Year: 2008, Reviewed
  • In: 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components (SSI)
  • Conference: 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components (SSI) in Barcelona, Spain (April 9-10, 2008)
  • Publisher: VDE
  • ISBN: 978-3-8007-3081-0



Arbeitsgruppe IMSAS



Alamin, A. B.; Sklorz, A.; Benecke, W.; Lang, W.
Development and Characterization of Platinum Thin Films for Gas Analysis Microsystem
In: 2nd European Conference & Exhibition on Integration Issues of Miniaturized Systems - MOMS, MOEMS, ICS and Electronic Components (SSI). VDE, 2008,
(Workgroup: IMSAS)
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