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A Micromachined, Membrane Based, Thermoelectric Flow Sensor for 2-Dimensional Measurement with High Angular Resolution
Authors
Hartgenbusch, N.
Borysov, M.
Jedermann, R.
Lang, W.
Meta information
[BibTeX]
Year: 2018, Reviewed
In: 2018 IEEE SENSORS
Conference: in New Delhi, India
Publisher: IEEE
Pages: pp. 1-4
ISBN: 978-1-5386-4708-0, eISBN: 978-1-5386-4707-3
DOI:
10.1109/ICSENS.2018.8589684
Hartgenbusch, N.; Borysov, M.; Jedermann, R.; Lang, W.
A Micromachined, Membrane Based, Thermoelectric Flow Sensor for 2-Dimensional Measurement with High Angular Resolution
In: 2018 IEEE SENSORS. IEEE, 2018, pp. pp. 1-4
(Workgroup:
IMSAS
)
BibTeX
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@inproceedings{Har18b, author = {Hartgenbusch, N. and Borysov, M. and Jedermann, R. and Lang, W.}, title = {A Micromachined, Membrane Based, Thermoelectric Flow Sensor for 2-Dimensional Measurement with High Angular Resolution}, booktitle = {2018 IEEE SENSORS}, year = {2018}, editor = {}, publisher = {IEEE}, doi = {10.1109/ICSENS.2018.8589684}, pages = {pp. 1-4} }
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