@article{Har20a, author = {Hartgenbusch, N. and Borysov, M. and Jedermann, R. and Lang, W.}, title = {Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement}, journal = {IEEE Sensors Journal}, year = {2020}, volume = {20}, number = {9}, doi = {10.1109/JSEN.2020.2965332}, pages = {4602-4609} }