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Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement
Authors
Hartgenbusch, N.
Borysov, M.
Jedermann, R.
Lang, W.
Meta information
[BibTeX]
Year: 2019, Reviewed
In: IEEE Sensors Journal
DOI:
10.1109
Hartgenbusch, N.; Borysov, M.; Jedermann, R.; Lang, W.
Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement
In: IEEE Sensors Journal, (2019)
(Workgroup:
IMSAS
)
BibTeX
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@article{Har19a, author = {Hartgenbusch, N. and Borysov, M. and Jedermann, R. and Lang, W.}, title = {Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement}, journal = {IEEE Sensors Journal}, year = {2019}, volume = {}, number = {}, doi = {10.1109}, pages = {} }
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