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Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement


Authors

  • Hartgenbusch, N.
  • Borysov, M.
  • Jedermann, R.
  • Lang, W.

Meta information [BibTeX]

  • Year: 2019, Reviewed
  • In: IEEE Sensors Journal
  • DOI: 10.1109




Arbeitsgruppe IMSAS




Hartgenbusch, N.; Borysov, M.; Jedermann, R.; Lang, W.
Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement
In: IEEE Sensors Journal, (2019)
(Workgroup: IMSAS)
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